Project |
Content |
Product Type |
6", 8", 12" frame wafer |
2D Inspection ltems |
Foreign objects, residual glue, particles, scratches, cracks, contamination, CP deviation, excessive area, etc Cutting channel deviation and chipping |
Cutting Path Inspection Items |
6", 8", 12" frame cassetee |
Lens and Resolution |
2x(2.75um)/3.5x(1.57um)/ 5x(1.1um)/7.5x(0.73um)/10x(0.55um) |
Precision |
0.55μm/pixel |
Optional and Customized |
INK module, IR module |
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