Sumber plasma
|
RF+BIAS
|
||
Kuasa
|
1000W
|
1000W
|
|
600W
|
600W
|
||
Bidang Kepantasan
|
4-8 inci
|
||
Bilangan irisan pemprosesan tunggal
|
satu
|
||
Dimensi penampilan
|
1140mm x 1050mm x 1620mm
|
||
Kawalan sistem
|
Sistem kawalan perindustrian
|
||
Tahap Automasi
|
Manual
|
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