Sumber plasma
|
RF
|
||
Kuasa
|
ICP
|
_
|
|
BIAS
|
1000W(pilihan)
|
||
Bidang Kepantasan
|
4~8 inci
|
||
Bilangan irisan pemprosesan tunggal
|
1
|
||
Dimensi penampilan
|
850mmx900mmx1850mm
|
||
Kawalan sistem
|
PLC
|
||
Tahap Automasi
|
Manual
|
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