Integrated Solution for Semiconductor Packaging Microwave Plasma Photoresist Removal Machine , China Integrated Solution for Semiconductor Packaging Microwave Plasma Photoresist Removal Machine Manufacturers, Suppliers, Factory

Product Description

Microwave Plasma Photoresist Removal Machine

Plasma Integrated Solution for Semiconductor Packaging

Integrated Solution for Semiconductor Packaging

Microwave plasma photoresist removal machine is a low-voltage microwave plasma photoresist removal system specifically designed for semiconductors. By applying a frequency of 2.45GHz microwave to the window on the wall of the vacuum chamber, a large and continuous amount of Plasma is generated, which enters the chamber for process cleaning of the chip. Suitable for different sizes of material boxes, it can meet different needs and provide customized solutions.

Integrated Solution for Semiconductor Packaging Microwave Plasma Photoresist Removal Machine manufacture

Integrated Solution for Semiconductor Packaging Microwave Plasma Photoresist Removal Machine factory

Integrated Solution for Semiconductor Packaging Microwave Plasma Photoresist Removal Machine details

Specification

PLASMA source	microwave
power	0-1250W
working space	6 magazine ranges (magazine size range: L260mmxW95mmxH190mm)
processing capacity	35um Pitch/40um Bump15x15mm maximum Die size
Appearance dimensions	480mmx470mmx500mm
System control	Industrial control system
Automation level	Manual