Project
|
Content
|
Product Type
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6", 8", 12" frame wafer
|
2D Inspection ltems
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Foreign objects, residual glue, particles, scratches, cracks, contamination, CP deviation, excessive area, etc
Cutting channel deviation and chipping |
Cutting Path Inspection Items
|
6", 8", 12" frame cassetee
|
Lens and Resolution
|
2x(2.75um)/3.5x(1.57um)/
5x(1.1um)/7.5x(0.73um)/10x(0.55um) |
Precision
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0.55μm/pixel
|
Optional and Customized
|
INK module, IR module
|
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