Vacuum plasma host unit(100) |
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Equipment size |
L 1000×W 900×H 1750mm |
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weight |
500Kg |
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Demand power supply |
AC380V, 50 / 60Hz, 5 line, 25A (total open type above C) |
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Plasma generator specification |
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power |
radio frequency |
intermediate frequency |
0~600W |
0-1000W |
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supply frequency |
13.56MHz |
40 K Hz |
Vacuum system |
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vacuum pump |
Overflight rotary pump (oil pump): 60 m3/h |
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vacuum pipeline |
All stainless steel line, as well as high strength vacuum bellows |
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material quality |
alufer |
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thickness |
25mm |
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tightness |
Military-grade welding seal |
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Internal dimensions of the cavity |
450*450*500mm(Width* high * depth) |
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Electric plate effective size |
322*351mm (wide *depth) |
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Available space spacing |
20mm |
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Electroplate arrangement |
Horizontal electrode plate |
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trays |
Standard set, material optional (aluminum, steel wire mesh) |
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work space |
8 layer |
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process gas |
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Flow range |
0~300SCCM |
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Process gas gas route |
Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon |
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navar |
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SC |
PLC |
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interactive mode |
7-Inch touch screen |
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