Vacuum plasma host unit(150) | ||||
Equipment size | L 1100×W 940×H 1755mm | |||
weight | 600Kg | |||
Demand power supply | AC380V, 50 / 60Hz, 5 line, 25A (total open type above C) | |||
Plasma generator specification | ||||
power | radio frequency | intermediate frequency | ||
0~1000W | 0-2000W | |||
supply frequency | 13.56MHz | 40 K Hz | ||
Vacuum system | ||||
vacuum pump | Leap monopole pump VSV 65 + Bowse Lots Pump BSJ 70 | |||
vacuum pipeline | All stainless steel line, as well as high strength vacuum bellows | |||
material quality | alufer | |||
thickness | 25mm | |||
tightness | Military-grade welding seal | |||
Internal dimensions of the cavity | 500*500*600mm (Width* high * depth) | |||
Electric plate effective size | 372(W) X 451(D)mm | |||
Available space spacing | 24mm | |||
Electroplate arrangement | Horizontal electrode plate | |||
trays | Standard set, material optional (aluminum, steel wire mesh) | |||
work space | 8 layer | |||
Process gas | ||||
Flow range | 0~300SCCM | |||
Process gas gas route | Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon | |||
Control System | ||||
SC | PC control | |||
interactive mode | Windows Interface |
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