Vacuum plasma host(200) |
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Equipment size |
1050×1700×1050mm(width, height and depth) |
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weight |
800Kg |
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demand power |
AC380V,50/60Hz,5wires, 30A |
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Plasma Generator Specifications |
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mains power |
radio frequency |
IF |
0~1000W |
0-2000W |
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Power frequency |
13.56MHz |
40 KHz |
Vacuum system |
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vacuum pump |
Feiyue unipolar pump VSV100+Both Roots pump BSJ70 |
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vacuum line |
All stainless steel pipes, and high-strength vacuum bellows |
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material |
Aluminum alloy |
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thickness |
25mm |
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tightness |
Military grade welded seal |
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Cavity Internal Dimensions |
600×600×600mm(W×H×D) |
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Effective size of electrode plate |
472 X 451mm (W×D) |
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space available |
35mm |
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Electrode plate layout |
Horizontal electrode plate |
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work tray |
One set is standard, and the material is optional (aluminum, steel mesh) |
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Workspace |
8 floors |
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Process gas |
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Flow range |
0~300SCCM |
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Process gas circuit |
Equipped with O2, Ar, N2 three-way gas |
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Control System |
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system control |
PC control |
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interactive mode |
Windows interface |
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