Vacuum plasma host(200) | ||||
Equipment size | 1050×1700×1050mm(width, height and depth) | |||
weight | 800Kg | |||
demand power | AC380V,50/60Hz,5wires, 30A | |||
Plasma Generator Specifications | ||||
mains power | radio frequency | IF | ||
0~1000W | 0-2000W | |||
Power frequency | 13.56MHz | 40 KHz | ||
Vacuum system | ||||
vacuum pump | Feiyue unipolar pump VSV100+Both Roots pump BSJ70 | |||
vacuum line | All stainless steel pipes, and high-strength vacuum bellows | |||
material | Aluminum alloy | |||
thickness | 25mm | |||
tightness | Military grade welded seal | |||
Cavity Internal Dimensions | 600×600×600mm(W×H×D) | |||
Effective size of electrode plate | 472 X 451mm (W×D) | |||
space available | 35mm | |||
Electrode plate layout | Horizontal electrode plate | |||
work tray | One set is standard, and the material is optional (aluminum, steel mesh) | |||
Workspace | 8 floors | |||
Process gas | ||||
Flow range | 0~300SCCM | |||
Process gas circuit | Equipped with O2, Ar, N2 three-way gas | |||
Control System | ||||
system control | PC control | |||
interactive mode | Windows interface |
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