Vacuum plasma host(200) |
||||
Equipment size |
1050×1700×1050mm(width, height and depth) |
|||
weight |
800Kg |
|||
demand power |
AC380V,50/60Hz,5wires, 30A |
|||
Plasma Generator Specifications |
||||
mains power |
radio frequency |
IF |
||
0~1000W |
0-2000W |
|||
Power frequency |
13.56MHz |
40 KHz |
||
Vacuum system |
||||
vacuum pump |
Feiyue unipolar pump VSV100+Both Roots pump BSJ70 |
|||
vacuum line |
All stainless steel pipes, and high-strength vacuum bellows |
|||
material |
Aluminum alloy |
|||
thickness |
25mm |
|||
tightness |
Military grade welded seal |
|||
Cavity Internal Dimensions |
600×600×600mm(W×H×D) |
|||
Effective size of electrode plate |
472 X 451mm (W×D) |
|||
space available |
35mm |
|||
Electrode plate layout |
Horizontal electrode plate |
|||
work tray |
One set is standard, and the material is optional (aluminum, steel mesh) |
|||
Workspace |
8 floors |
|||
Process gas |
||||
Flow range |
0~300SCCM |
|||
Process gas circuit |
Equipped with O2, Ar, N2 three-way gas |
|||
Control System |
||||
system control |
PC control |
|||
interactive mode |
Windows interface |
Copyright © Guangzhou Minder-Hightech Co.,Ltd. All Rights Reserved