Vacuum plasma host unit (60)
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Equipment size
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L 950×W 900×H 1650mm
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weight
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350Kg
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Demand power supply
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AC380V, 50 / 60Hz, 5 line, 16A (total open type above C)
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Plasma generator specification
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power
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radio frequency
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intermediate frequency
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0~600W
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0-1000W
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supply frequency
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13.56MHz
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40 K Hz
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Vacuum system
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vacuum pump
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Double-stage rotary pump (oil pump): 40m3/h
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vacuum pipeline
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All stainless steel line, as well as high strength vacuum bellows
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material quality
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Aluminum alloy (customizable stainless steel cavity)
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thickness
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25mm
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tightness
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Military-grade welding seal
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Internal dimensions of the cavity
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375*375*430mm(Width* high * depth)
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Electric plate effective size
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247*281mm (wide* depth)
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Available space spacing
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22mm
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Electroplate arrangement
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Horizontal layout, can be active extraction
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trays
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Standard set, material optional (aluminum, steel wire mesh)
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work space
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6 layer
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process gas
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Flow range
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0~300SCCM
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Process gas gas route
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Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon
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navar
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SC
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PLC
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interactive mode
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7-Inch touch screen
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