Vacuum plasma host unit (60) | ||||
Equipment size | L 950×W 900×H 1650mm | |||
weight | 350Kg | |||
Demand power supply | AC380V, 50 / 60Hz, 5 line, 16A (total open type above C) | |||
Plasma generator specification | ||||
power | radio frequency | intermediate frequency | ||
0~600W | 0-1000W | |||
supply frequency | 13.56MHz | 40 K Hz | ||
Vacuum system | ||||
vacuum pump | Double-stage rotary pump (oil pump): 40m3/h | |||
vacuum pipeline | All stainless steel line, as well as high strength vacuum bellows | |||
material quality | Aluminum alloy (customizable stainless steel cavity) | |||
thickness | 25mm | |||
tightness | Military-grade welding seal | |||
Internal dimensions of the cavity | 375*375*430mm(Width* high * depth) | |||
Electric plate effective size | 247*281mm (wide* depth) | |||
Available space spacing | 22mm | |||
Electroplate arrangement | Horizontal layout, can be active extraction | |||
trays | Standard set, material optional (aluminum, steel wire mesh) | |||
work space | 6 layer | |||
process gas | ||||
Flow range | 0~300SCCM | |||
Process gas gas route | Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon | |||
navar | ||||
SC | PLC | |||
interactive mode | 7-Inch touch screen |
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