Vacuum plasma host unit (60) |
||||
Equipment size |
L 950×W 900×H 1650mm |
|||
weight |
350Kg |
|||
Demand power supply |
AC380V, 50 / 60Hz, 5 line, 16A (total open type above C) |
|||
Plasma generator specification |
||||
power |
radio frequency |
intermediate frequency |
||
0~600W |
0-1000W |
|||
supply frequency |
13.56MHz |
40 K Hz |
||
Vacuum system |
||||
vacuum pump |
Double-stage rotary pump (oil pump): 40m3/h |
|||
vacuum pipeline |
All stainless steel line, as well as high strength vacuum bellows |
|||
material quality |
Aluminum alloy (customizable stainless steel cavity) |
|||
thickness |
25mm |
|||
tightness |
Military-grade welding seal |
|||
Internal dimensions of the cavity |
375*375*430mm(Width* high * depth) |
|||
Electric plate effective size |
247*281mm (wide* depth) |
|||
Available space spacing |
22mm |
|||
Electroplate arrangement |
Horizontal layout, can be active extraction |
|||
trays |
Standard set, material optional (aluminum, steel wire mesh) |
|||
work space |
6 layer |
|||
process gas |
||||
Flow range |
0~300SCCM |
|||
Process gas gas route |
Standard with two ways, can be customized. The process gas pipeline is made of ferrofllon |
|||
navar |
||||
SC |
PLC |
|||
interactive mode |
7-Inch touch screen |
Copyright © Guangzhou Minder-Hightech Co.,Ltd. All Rights Reserved