Stage size | 8, 12[inch] | MAX 300x300[mm] | |
Ball size | Ф50[um]~ Ф300[μm] | ||
Min. ball pitch | 90[um](Ф50[um] ball) | ||
Alignment accuracy | +15[um] | ||
Dimensions | 3,065W x 1,700D x 1,650H[mm] | ||
Weight | Approx. 2,900[kg] | ||
Loader/ Unloader | Open cassette, FOUP | Customizable |
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