Model | MDWX-WI8100 |
Loader | Minder-Hightech |
Optical system | Minder-Hightech |
Software function | Defect map coordinate reading (corresponding to KLA, Camtek, etc.), and automatic alignment |
Defect map information screening and automatic photography, archiving | |
Automatic image measurement: CD, Overlay | |
Defect map image database | |
Automatic light source adjustment system/automatic image camera function/automatic positioning measurement |
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