Rapid Thermal Processing
RTP equipment for compound semiconductors、SlC、LED and MEMS
* Oxide, nitride growth
* Ohmic contact rapid alloy
* Annealing of silicide alloy
* Oxidation reflux
* Gallium arsenide process
* Other rapid heat treatment processes
Fully automatic dual chamber RTP
* Compatible with 6-8inch WAFER
* The maximum temperature can reach 1250°c
* Stable temperature reproducibility
* Fully automatic dual chamber design to increase production capacity
* Uniformity of ultra-high temperature field
* Meet the demand for SlC mass production process
Semi-automatic RTP
* Infrared halogen lamp tube heating, cooling using air cooling;
* PlD temperature control for lamp power, which can accurately control temperature rise, ensuring good reproducibility and temperature uniformity;
* The inlet of the material is set on the WAFER surface to avoid cold point production during the annealing process and ensure good temperature uniformity of the product;
* Both atmospheric and vacuum treatment methods can be selected, with pre-treatment and purification of the body;
* Two sets of process gases are standard and can be expanded to up to 6 sets of process gases;
* The maximum size of a measurable single crystal silicon sample is 12inches(300x300MM);
* The three safety measures of safe temperature opening protection, temperature controller opening permission protection, and equipment emergency stop safety protection are fully implemented to ensure the safety of the instrument;
Desktop RTP
* Infrared halogen lamp tube heating, cooling using air cooling;
* PlD temperature control for lamp power, which can accurately control temperature rise, ensuring good reproducibility and temperature uniformity;
* The inlet of the material is set on the WAFER surface to avoid cold point production during the annealing process and ensure good temperature uniformity of the product;
* Both atmospheric and vacuum treatment methods can be selected, with pre-treatment and purification of the body;
* Two sets of process gases are standard and can be expanded to up to 6 sets of process gases;
* The maximum size of a measurable single crystal silicon sample is 12inches(300x300MM);
* The three safety measures of safe temperature opening protection, temperature controller opening permission protection, and equipment emergency stop safety protection are fully implemented to ensure the safety of the instrument;
We have 16 years of experience in equipment sales ,and can provide you with a one-stop IC Package Line Equipment solution!
Are you looking for dependable RTP equipment for your compound semiconductor SlC LED MEMS manufacturing procedures? Look no more compared to Minder-Hightech.
Flaunts exceptional abilities for rapid processing is thermal creating it perfect for creating first-class aspects semiconductors, SlC MEMS gadgets, and LEDs. Along with Minder-Hightech innovation at your disposition, you can accomplish temperature level is accurate, constant home heating, and reduced problem thickness in your services or products.
Includes an individual user interface is easy to use creating specific it is easy for drivers of all of ability degrees towards utilize and navigates. Its own progressed automation abilities enable you towards improve your manufacturing procedures, decreasing the requirement for handbook protecting and function you cash and opportunity.
The importance is comprehended through our team of equipment dependability. That is why our RTP devices are developed along with top quality aspects and developed towards endure extensive use is everyday absence of efficiency or even features. Our team likewise deal routine assist and upkeep solutions towards guarantee your equipment's durability.
Whether you are associated with the areas of compound semiconductor manufacturing, LED production, or even MEMS system advancement, Minder-Hightech RTP equipment offers unparalleled effectiveness and accuracy. Therefore, why hang around? Update your productions procedure towards the degree is following purchasing Minder-Hightech RTP equipment today.
If you require top quality RTP equipment towards increase the efficiency and effectiveness of your compound semiconductor SlC LED MEMS manufacturing procedure, rely on Minder-Hightech. Our progressed innovation, dependable devices, and exceptional client sustain create our team the leading options for business about the globe.
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