Grindable wafer
|
Size
|
Inches
|
4,5,6,8
|
Rubbing way
|
-
|
Vertical plunge grinding method
|
|
Grinding wheel spindle
|
Types
|
-
|
Air bearings
|
Quantity
|
-
|
1
|
|
Speed
|
rpm
|
0~5000
|
|
Output Power
|
Kw
|
5.5/7.5
|
|
Stroke
|
mm
|
150
|
|
Feed Speed
|
um/s
|
0.01~100
|
|
Fast forward speed
|
mm/min
|
300
|
|
Resolution
|
um
|
0.1
|
|
Workpiece axis
|
Type
|
-
|
Ball bearings
|
Quantity
|
-
|
1
|
|
Speed
|
rpm
|
0~300
|
|
Power
|
kw
|
0.75
|
|
Suction cup type
|
-
|
Microporous ceramics
|
|
Wafer suction method
|
-
|
Vacuum adsorption
|
|
Wafer transfer
|
-
|
Manual
|
|
Other functions
|
Wafer centering
|
-
|
-
|
Wafer cleaning
|
-
|
-
|
|
Suction cup cleaning
|
-
|
-
|
|
Grinding wheel
|
mm
|
Φ200
|
|
Online
measurement |
Measurement range
|
um
|
0~1800
|
Resolution
|
um
|
0.1
|
|
Repeat accuracy
|
um
|
±0.5
|
|
Machining
accuracy |
Intra-wafer accuracy (TTV)
|
um
|
≤2
|
Inter-wafer accuracy (WTW)
|
um
|
±3
|
|
Surface roughness (Ry)
|
um
|
0.1(2000#finish)
|
|
Appearance
|
Appearance coloring
|
um
|
Orange Pattern
|
Dimensions(W×D×H)
|
mm
|
690×1720×1780
|
|
Weight
|
kg
|
1400
|
Grindable wafer
|
Size
|
Inches
|
6,8,12
|
Rubbing way
|
-
|
Vertical plunge grinding method
|
|
Grinding wheel spindle
|
Types
|
-
|
Air bearings
|
Quantity
|
-
|
1
|
|
Speed
|
rpm
|
0~5000
|
|
Output Power
|
Kw
|
5.5/7.5
|
|
Stroke
|
mm
|
150
|
|
Feed Speed
|
um/s
|
0.01~100
|
|
Fast forward speed
|
mm/min
|
300
|
|
Resolution
|
um
|
0.1
|
|
Workpiece axis
|
Type
|
-
|
Ball bearings
|
Quantity
|
-
|
1
|
|
Speed
|
rpm
|
0~300
|
|
Suction cup type
|
-
|
Microporous ceramics
|
|
Wafer suction method
|
-
|
Vacuum adsorption
|
|
Wafer transfer
|
-
|
Manual
|
|
Other functions
|
Wafer centering
|
-
|
-
|
Wafer cleaning
|
-
|
-
|
|
Suction cup cleaning
|
-
|
-
|
|
Grinding wheel
|
mm
|
Φ300
|
|
Online
measurement |
Measurement range
|
um
|
0~1800
|
Resolution
|
um
|
0.1
|
|
Repeat accuracy
|
um
|
±0.5
|
|
Machining
accuracy |
Intra-wafer accuracy (TTV)
|
um
|
≤3
|
Inter-wafer accuracy (WTW)
|
um
|
±3
|
|
Surface roughness (Ry)
|
um
|
0.13(2000#finish)
|
|
Appearance
|
Appearance coloring
|
um
|
Orange Pattern
|
Dimensions(W×D×H)
|
mm
|
790×2170×1830
|
|
Weight
|
kg
|
1800
|
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