Semiconductor indurstry equipments MDLB-MC200 Photomask cleaner

No.

Project

Specifications

Remarks

1

Equipment Overview

Device Name: Photomask Cleaner

Equipment model: MDLB-MC200

Overall dimensions (approximately): 1300mm (W) * 1000mm (D) * 1950mm (H)

Whole machine weight (approximately): 300KG

Operating table height: 900 ± 50mm

Substrate size specifications: suitable for 2/4/5/6/8 inch square mask plates

Process flow: manual wafer placement → cleaning (brush, cleaning solution → high-pressure water → megasonic water → deionized water → nitrogen gas drying) → manual wafer removal

Equipment type: semi-automatic, manual loading and unloading

2

Equipment construction

Shell: stainless steel, smooth, corrosion-resistant, easy to clean

Cleaning chamber: PP, smooth, corrosion-resistant, easy to clean

Pipeline: PU/PFA matching pipeline is used

Work lighting: anti-corrosion yellow light lighting

Door opening style: Double door with door opening alarm function

Touch screen: 10 inch full-color touch screen * 1

FFU: Class 100

Leak proof bottom support: available

3

High precision servo motor

Quantity: 1

Speed: -3000~3000rpm

Empty load

Maximum acceleration of spindle rotation: 3000rpm/S

Empty load

Speed accuracy: ± 1rpm (50rpm~3000rpm)

Speed resolution: 1rpm

4

Automatic swing arm

Quantity: 3

Swing arm speed: 1~30 °/S

5

Cleaning unit

Cleaning swing arm: 1 channel of deionized water, 1 channel of nitrogen gas

Megasonic Arm: 1 Megasonic, 1 High Pressure Water

Brush arm: 1 brush, 1 water, 1 cleaning solution

Cleaning method: automatic cleaning

Deionized water suction function: available

Backwash (deionized water): 1 route

Supply method: Cleaning solution: Diaphragm pump

Deionized water: supplied directly by the factory

Pressure tank with liquid level detection

6

Brush brush

Quantity: 1 (with self-cleaning function)

Speed: up to 1000rpm, adjustable speed

Height manually adjustable

7

Load tray

Quantity: 5

Material: PPS+stainless steel

Size: Suitable for 2/4/5/6/8 inch square mask plates

Substrate fixing method: Claw fixing method

8

Control system

Control system: using PLC control

Program: 100 groups, each group consisting of 100 steps, with a maximum single step time of 3000.0 seconds

Resolution: 0.1S

The program can be saved, called, modified, and deleted

Set encryption permissions: for device operators, technicians, administrators, and manufacturers respectively

Signal tower type: red, yellow, green 3 colors