PLASMA source
|
RF
|
microwave
|
Power
|
1000w
|
1250w
|
Applicable scope
|
4~8 inch
|
4~8寸
|
Single processing slice count
|
4~6 inch=50 piece /8inch=25 piece
|
4~6 inch=50 piece/8 inch=25 piece
|
Appearance dimensions
|
1250x1630x1900mm
|
1250x1630x1900mm
|
System control
|
PC
|
PC
|
Automation level
|
Auto
|
Auto
|
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