|
Model |
MDS-UC08 |
MDS-UC12 |
MDHYS82 |
MDHYS122 |
|
Maximum size of wafer |
6’’&8’’ |
12” |
6’’&8’’ |
12” |
|
Light source |
LED lamp, wavelength 365nm, light intensity ≥ 1000mJ / cm2 |
|||
|
Membrane type |
UV membrane |
|||
|
Lamp Lifetime |
10000h |
10000h |
20000h |
20000h |
|
Power supply |
AC220V,5A |
AC220V,5A |
AC220V,6A |
AC220V,6A |
|
Overall dimension W*D*H |
650mm*420mm*250mm |
570mm*630mm*340mm |
780mm*620mm*295mm |
930mm*790mm*350mm |
|
Weight |
30kg |
60kg |
55kg |
75kg |
|
Functional features |
Manual wafer loading and unloading The irradiation time can be set arbitrarily Equipped with cooling fan One click operation is convenient and fast The equipment has self-protection function It can be customized according to demand |
Manual wafer loading and unloading The irradiation time can be set arbitrarily Equipped with cooling fan Optional nitrogen charging function Optional embedded UV energy sensor It can be customized according to demand |
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