Vacuum microwave plasma cleaning machine Plasma Surface Treatment Semiconductor Packaging solution IC TO package , China Vacuum microwave plasma cleaning machine Plasma Surface Treatment Semiconductor Packaging solution IC TO package Manufacturers, Suppliers, Factory

Products Description

Semiconductor Packaging solution Microwave Plasma Cleaner

SPV-100MWR is a low voltage microwave plasma cleaning system for semiconductors. By applying microwave with the frequency of 2.45GHz to the window on the wall of the vacuum cavity, a large number of continuous Plasma is generated, and the chip is cleaned by entering the cavity.

Vacuum microwave plasma cleaning machine Plasma Surface Treatment Semiconductor Packaging solution IC TO package supplier

Technical parameters

Vacuum plasma host
Equipment size	1230X1800X1100mm (width x height x depth)
Weight	450kg
Power demand	AC380V, 50/60Hz, 5-wire, 30A
Plasma generator specifications
Microwave power supply	Power	0~1250W
		Frequency	2.45GHz
Vacuum system
Material	Aluminum alloy (customizable stainless steel chamber)
Thickness	25mm
Internal dimensions of the cavity	480mmX470mmX480mm
Workspaces	6 magazine sections
ECR	Slotted Magazine provides ECR enhanced processing effect
Plasma capability
Processing ability	35um Pitch 40μm Bump 15X15mm Maximum Die size