Technical parameter | Measurement mode | PSI/VSI/super depth of field/bright field |
Single measurement field of view (20× objective lens) | 500*350μm (automatic stitching) | |
Angle adjustment | ±12° manual | |
Z-axis adjustment | 20mm electric + 50mm manual (coarse and fine adjustment mechanism) | |
Longitudinal scanning range | 0-10mm | |
Longitudinal resolution | <0.2nm | |
Repeatability of longitudinal roughness measurement | 0.01nm (PSI mode) | |
indication error of step height measurement | <0.75% (VSI mode) | |
Lateral resolution: @550nm | 0.69μm (20× objective lens) | |
Measurable sample reflectivity | 0.1%-100% | |
Measurement time | <5s (PSI mode) | |
Analysis function | Analysis function | 3D height measurement, 3D roughness analysis, 2D dimension measurement |
3D data output | 3D point cloud data, grayscale image data, customized report |
Objective magnification | 2.5x | 5x | 10x | 20x | 50x | 100x |
Numerical aperture | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 |
Optical resolution @550nm (μm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 |
Depth of focus (μm) | 48.7 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 |
Working distance (mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 |
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