Technical parameter |
Measurement mode |
PSI/VSI/super depth of field/bright field |
Single measurement field of view (20× objective lens) |
500*350μm (automatic stitching) |
|
Angle adjustment |
±12° manual |
|
Z-axis adjustment |
20mm electric + 50mm manual (coarse and fine adjustment mechanism) |
|
Longitudinal scanning range |
0-10mm |
|
Longitudinal resolution |
<0.2nm |
|
Repeatability of longitudinal roughness measurement |
0.01nm (PSI mode) |
|
indication error of step height measurement |
<0.75% (VSI mode) |
|
Lateral resolution: @550nm |
0.69μm (20× objective lens) |
|
Measurable sample reflectivity |
0.1%-100% |
|
Measurement time |
<5s (PSI mode) |
|
Analysis function |
Analysis function |
3D height measurement, 3D roughness analysis, 2D dimension measurement |
3D data output |
3D point cloud data, grayscale image data, customized report |
Objective magnification |
2.5x |
5x |
10x |
20x |
50x |
100x |
Numerical aperture |
0.075 |
0.13 |
0.3 |
0.4 |
0.55 |
0.7 |
Optical resolution @550nm (μm) |
3.7 |
2.1 |
0.92 |
0.69 |
0.5 |
0.4 |
Depth of focus (μm) |
48.7 |
16.2 |
3.04 |
1.71 |
0.9 |
0.56 |
Working distance (mm) |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
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