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  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine
  • Reactive ion etching system ( RIE ) Seminconductor industry machine

Reactive ion etching system ( RIE ) Seminconductor industry machine

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Paglalarawan ng Produkto

Mga materyales na inilapat:

Pasivasyon layer: SiO2, SiNx
Likod na silicon
Adhesibong layer: TaN
Butas: W

Tampok:

1. Pag-etche ng pasivasyon layer may o walang butas;
2. Pag-eetch ng adhesive layer;
3. Back silicon etching
Reactive ion etching system ( RIE ) Seminconductor industry machine supplier
Reactive ion etching system ( RIE ) Seminconductor industry machine details
Reactive ion etching system ( RIE ) Seminconductor industry machine factory
Espesipikasyon
Paggawa ng proyekto at diagram ng estruktura ng makina
Item
MD150-RIE
MD200-RIE
MD200C-RIE
Sukat ng Produkto
≤6 inches
≤8 inches
≤8 inches
RF power source
0-300W/500W/1000W Ayos, awtomatikong pagsasamantala
Molecular Pump
-620(L/s)/1300(L/s)/Pasadya
Antiseptiko620(L/s)/1300(L/s)/Pasadya
Foreline pamp
Mekanikal na pamp/dry pamp
Tuyong Pump
Prosesong presyon
Hindi kontroladong presyon/0-1Torr kontroladong presyon
Uri ng gas
H/CH4/O2/N2/Ar/SF6/CF4/
CHF3/C4F8/NF3/Pasadya
(Hanggang 9 channel, walang korosibong at dumi gas)
H2/CH4/O2/N2/Ar/F6/CF4/ CHF3/C4F8/NF3/Cl2/BCl3/HBr(Hanggang 9 channel)
hanay ng gas
0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/pasadya
LoadLock
Oo/Hindi
Oo
Mga halaman ng kontrol sa temperatura
10°C~Temperatura ng kuwarto/-30°C~100°C/Bipinili
-30°C~100°C/Bipinili
Paggamit ng helium para sa pag-init
Oo/Hindi
Oo
Paglilinis sa loob ng kavityahe
Oo/Hindi
Oo
Kontrol sa temperatura ng pader ng kavityahe
Hindi/Kuwarto temperaturang~60/120°C
Temperatura ng kuwarto-60/120°C
Control System
Awtomatiko/bipinili
Materyales para sa etching
Silicon-based: Si/SiO2/SiNx···
IV-IV: SiC
Magnetikong materyales/alloy materyales
Metallic material: Ni/Cr/Al/Au.....
Organic material: PR/PMMA/HDMS/Organic
pelikula......
Silicon-based: Si/SiO2/SiNx......
III-V(注3): InP/GaAs/GaN......
IV-IV: SiC
II-VI (注3): CdTe......
Magnetikong materyales/alloy materyales
Metallic material: Ni/Cr/A1/Au......
Materyales na Organiko: PR/PMMA/HDMS /pelikula ng organiko...
Resulta ng proseso

Pag-eetch ng materyales na silicon-based

Mga materyales na silicon-basado, mga pattern ng nano-imprint, array
mga pattern at lens pattern etching
Reactive ion etching system ( RIE ) Seminconductor industry machine manufacture

InP normal temperature etching

Paggagat sa pattern ng mga device na batay sa InP na ginagamit sa optiko communication, kabilang ang estraktura ng waveguide, resonant cavity structure ridge structure etc
Reactive ion etching system ( RIE ) Seminconductor industry machine factory

SiC material etching

Konting para sa mga device ng microwave, power devices, etc
Reactive ion etching system ( RIE ) Seminconductor industry machine supplier
Pisikal na pagsusputter, paggagat Organic materiale paggagat
Ito ay inilapat sa etching ng mga mahirap mang-etetch na materyales tulad ng ilang mga metal (tulad ng Ni/Cr) at ceramics, at ang
patterned eetching ng mga material ay natatanto sa pamamagitan ng pisikal na pagbomba.
Ginagamit ito para sa etching at pag-aalis ng mga organic compounds tulad ng photoresist (PR)/PMMA/HDMS/polymer
Reactive ion etching system ( RIE ) Seminconductor industry machine manufacture
Pakete & Paghahatod
Reactive ion etching system ( RIE ) Seminconductor industry machine manufacture
Reactive ion etching system ( RIE ) Seminconductor industry machine details
Company Profile
Mayroon kaming 16 taong karanasan sa pagbebenta ng makinarya. Maaari naming ibigay sa iyo ang One-stop Semiconductor Front-end at Back end Package Line equipments na solusyon mula sa Tsina.
Reactive ion etching system ( RIE ) Seminconductor industry machine supplier

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